Metal treatment – Compositions – Heat treating
Patent
1981-11-17
1983-11-15
Roy, Upendra
Metal treatment
Compositions
Heat treating
29576B, 148187, 357 91, 427 531, H01L 21265, B23K 2700
Patent
active
044153732
ABSTRACT:
A process for gettering defects in a semiconductor is provided. The process comprises using a laser beam to drive a dopant material into a melted non-active surface of a semiconductor device, followed by heating the semiconductor to drive defects to traps formed by the dopant. The process creates in the bulk of the semiconductor strain fields that not only trap defects, which would otherwise degrade device performance, but also hold the defects during subsequent processing steps.
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Allied Corporation
Fuchs Gerhard H,.
Risenfeld James
Roy Upendra
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