Incremental printing of symbolic information – Light or beam marking apparatus or processes – Scan of light
Patent
1991-11-19
1995-02-14
Reinhart, Mark J.
Incremental printing of symbolic information
Light or beam marking apparatus or processes
Scan of light
B41J 2435
Patent
active
053899547
ABSTRACT:
In a laser process apparatus, a plurality of holes each having a predetermined shape are formed in a work upon radiation of light from an excimer laser. The apparatus is provided with a mask, in which a plurality of predetermined small holes are formed in correspondence with the plurality of holes to be formed in the work, and which allows laser light from the excimer laser to pass through the small holes thereof toward the work, a projection optical system for projecting optical images each having a predetermined shape onto the work through the small holes of the mask, a measurement optical system for measuring a work position, and a moving stage for moving the work on the basis of a measurement result form the measurement optical system.
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Goto Akira
Ichikawa Fumio
Inaba Masaki
Kohno Hiroshi
Masuda Kazuaki
Canon Kabushiki Kaisha
Reinhart Mark J.
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