Laser probing for solid-state device

Details Laser probing for solid-state device Laser probing for solid-state device

1985-11-20

1988-04-05

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, 382 8, G01R 3126, G01R 3128, G06R 900

Patent

active

047361590

ABSTRACT:
In laser probing of LSI, PICs' (photo-induced currents) are measured at the power source terminal of the LSI, under scanning of laser beam for a good LSI and a fault LSI, the measured PICs' are then superposingly displayed as red and green images, respectively; then faults of LSI are displayed as red spots in a yellow image made by superposition of green and red images.

REFERENCES:
patent: 4178064 (1979-12-01), Mrdjen
patent: 4479145 (1984-10-01), Azuma et al.
Nasashi Nagase; "Device Analysis System Based on Laser Scanning Techniques"; Microelectron. Reliab., vol. 20, pp. 717-735; 1980.
Tsujiyama et al; "A Highly Reliable Mask Inspection System"; IEEE Transaction on Electron Device; vol. Ed 27, No. 7; Jul. 1980; pp. 1284-1290.
Translation of "Failure Analysis for LSIs Using a Laser Probe", A Device Analysis System Based on Laser Scanning Techniques by Shiragasawa et al.

Affiliated with

Also associated with

Rating

Laser probing for solid-state device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser probing for solid-state device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser probing for solid-state device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2235438