Laser power control system

Details Laser power control system Laser power control system

1989-06-20

1990-05-22

Scott, Jr., Leon

Coherent light generators

Particular beam control device

Optical output stabilization

372 13, 372 33, 372 26, H01S 313

Patent

active

049282840

ABSTRACT:
A laser power beam control system includes a photodetector for generating an electrical signal which is proportional to the power level of the laser beam. The electrical signal is converted to a high frequency modulated signal which controls a single acousto-optical modulator. The acousto-optical modulator is in the laser beam path and controls the power level of the beam in response to the amplitude modulated signal. The system is particularly adapted to control a laser beam used in raster or vector scanning a laser for the formation of semiconductor integrated circuits.

REFERENCES:
patent: 4105953 (1978-08-01), Jernigan
patent: 4586184 (1986-04-01), Hess
patent: 4665524 (1987-05-01), Cotter
patent: 4672192 (1989-06-01), Muka et al.

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