Laser patterned semiconductor capacitor

Details Laser patterned semiconductor capacitor Laser patterned semiconductor capacitor

1996-02-07

1997-01-28

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361303, H01G 4005, H01G 406

Patent

active

055983170

ABSTRACT:
A semiconductor capacitor used to test for contaminants in a fabrication line is created by: forming a layer of insulating material on a semiconductor substrate, forming a layer of conductive thin film on the layer of insulating material, and laser patterning an area of the conductive thin film. Laser patterning is performed by applying the laser along the outer boundary of the area to be patterned to energetically remove the conductive thin film along this boundary.

REFERENCES:
patent: 5187637 (1993-02-01), Embree
patent: 5355277 (1994-10-01), Hoshiba

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