Electric heating – Metal heating – By arc
Patent
1993-07-20
1996-12-17
Ledynh, Bot L.
Electric heating
Metal heating
By arc
29 2542, 437919, B23K 2600, H01G 700
Patent
active
055850162
ABSTRACT:
A semiconductor capacitor used to test for contaminants in a fabrication line is created by: forming a layer of insulating material on a semiconductor substrate, forming a layer of conductive thin film on the layer of insulating material, and laser patterning an area of the conductive thin film. Laser patterning is performed by applying the laser along the outer boundary of the area to be patterned to energetically remove the conductive thin film along this boundary.
REFERENCES:
patent: 3609473 (1971-09-01), Bittman et al.
patent: 3622742 (1971-11-01), Cohen et al.
patent: 3650796 (1972-03-01), Jackson et al.
patent: 3768157 (1973-10-01), Buie
patent: 3772496 (1973-11-01), Harendza-Harinxma
patent: 3867217 (1975-02-01), Maggs et al.
patent: 4668330 (1987-05-01), Golden
patent: 4691434 (1987-09-01), Percival et al.
patent: 4820897 (1989-04-01), Lefevre
patent: 4825034 (1989-04-01), Auvert et al.
patent: 4989059 (1991-01-01), Micheels et al.
patent: 5022960 (1991-06-01), Takeyama et al.
patent: 5304831 (1994-04-01), Yilmaz et al.
patent: 5338424 (1994-08-01), Drimer et al.
Yu et al., "Applications of Excimer Lasers in Microelectronics," Proceedings of the SPIE, The Int'l Society for Optical Eng., vol. 1598, 1991, pp. 186-197.
Kiyama, "Laser Machining Characterictics . . . " Journal of Japan Soc. of Precision Eng., vol. 57, No. 1, Jan. 1991, pp. 178-183 Abstract in English.
Osgood, "Laser Fabrication for Solid State Electronics," IEEE Circuits and Devices Mag., vol. 6, No. 5, Sep. 1990, pp. 25-31.
Peyre et al., "Excimer Laser-induced etching . . . " Hybrid Circuits, No. 21, Jan. 1990, pp. 6-9.
Zaininger et al., "The C-V Technique as an Analytical Tool," Solid State Technol, vol. 13, No. 5, Jun. 1970, pp. 49-56.
Hanrahan Ciaran
Stack Andrew P.
Integrated Device Technology Inc.
Ledynh Bot L.
LandOfFree
Laser patterned C-V dot does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Laser patterned C-V dot, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser patterned C-V dot will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1988781