Laser pattern generation apparatus

Details Laser pattern generation apparatus Laser pattern generation apparatus

1988-03-28

1989-01-03

Perkey, W. B.

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Record receiver deforming

346108, G03B 4100, G01D 942

Patent

active

047960388

ABSTRACT:
A laser pattern generation apparatus particularly suited for semiconductor applications. The laser beam is split into a plurality of beams and modulated with acousto-optic modulators. A rotating mirror having a plurality of facets causes the beam to scan the workpiece.

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"Better Circuit Masks Exposed", Bell Labs., Solid State Technologie, vol. 13, No. 9, Sep. 1970, p. 18.

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