Coherent light generators – Particular active media – Gas
Reexamination Certificate
2006-10-03
2006-10-03
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S055000
Reexamination Certificate
active
07116695
ABSTRACT:
An apparatus and method for producing laser output light pulses in bursts of pulses, at a selected pulse repetition rate, forming a laser output light beam, separated by an off time is disclosed, which may comprise a laser output light pulse beam parameter adjustment system, which may comprise a laser output light pulse beam parameter error detector providing a beam parameter error signal representative of the difference between the beam parameter and a selected target value for the beam parameter; a beam parameter adjustment mechanism; a beam parameter adjustment mechanism controller providing a beam parameter adjustment signal to the beam parameter adjustment mechanism based upon the value of the beam parameter error signal; a slow transient compensator providing a slow transient inversion signal modifying the beam parameter adjustment signal based upon the value of the beam parameter error signal. The apparatus and method may further comprise a beam parameter error scaling mechanism providing a normalized beam parameter error signal determined from the value of the beam parameter error signal; and the beam parameter adjustment mechanism controller and the slow transient controller providing, respectively, the beam parameter adjustment signal and the slow transient inversion signal based upon the normalized beam parameter error signal. The beam parameter adjustment mechanism controller may provide the beam parameter adjustment signal based upon a controller function that minimizes the average actual wavelength error or a windowed standard deviation of the actual wavelength error.
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Cray William C.
Cymer Inc.
Harvey Minsun Oh
Nguyen Tuan N.
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