Coherent light generators – Particular resonant cavity
Patent
1991-07-22
1993-04-13
Healy, Brian
Coherent light generators
Particular resonant cavity
372 99, 372101, 372108, H01S 308
Patent
active
052028984
ABSTRACT:
The present invention relates to a laser oscillator, especially to a laser oscillator suitable for ultrafine manufacturing such as an apparatus for manufacturing of a semiconductor wherein the laser oscillator is provided with constant directivity chronically, although the directivity is not so fine, for avoiding a blurred image spatially and chronically in order to obtain a stable mask in the ultrafine manufacturing. The laser oscillator includes apparatus for enabling at least one of selection of the directivity of parallel light from a resonator between a whole reflector and a laser medium; an optical system for stopping oscillation of the laser medium before a laser beam, which is generated at the resonator, becomes a single mode and for eliminating the laser beam having poor directivity; prevention of the laser medium from re-entry of unnecessary natural emitting light which is generated in the laser medium; and providing a value of a diameter of an aperture of the optical system for maintaining directivity so as to make an order number of the transverse mode high.
REFERENCES:
patent: 3537028 (1970-10-01), Pankove
patent: 4551684 (1985-11-01), Bernhardt
patent: 4649544 (1987-03-01), Haas et al.
patent: 4715040 (1987-12-01), Lee
patent: 4745618 (1988-05-01), Burger
patent: 4803694 (1989-02-01), Lee et al.
patent: 4998256 (1991-03-01), Ohshima et al.
patent: 5079772 (1992-01-01), Negus et al.
patent: 5097476 (1992-03-01), Thiessen
patent: 5101415 (1992-03-01), Kolb et al.
patent: 5125001 (1992-06-01), Yagi et al.
Patent Abstracts of Japan (JP-A-59 147477) vol. 8, No. 277 (E-285) Aug. 1984.
Patent Abstracts of Japan (JP-A-2170585) vol. 14, No. 437 (E-98) Jul. 1990.
Patent Abstracts of Japan (JP-A-1011326) vol. 13, No. 186 (E-752) Jan. 1989.
Bhatnagar et al., "Performance of a copper vapor laser . . . " Optics Comm. vol. 74, No. 1/2 pp. 93-96.
Singh et al., "Effect of Intracavity Spatial Filtering . . . " J. of Applied Physics vol. 69, No. 1 Jan. 1991, pp. 537-538.
Shirakura Toshiharu
Sugawara Hiroyuki
Yamai Hideki
Yamamura Takeshi
Healy Brian
Hitachi , Ltd.
Hitachi Engineering Co. Ltd.
LandOfFree
Laser oscillator, laser resonator, and apparatus for manufacturi does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Laser oscillator, laser resonator, and apparatus for manufacturi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser oscillator, laser resonator, and apparatus for manufacturi will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1160420