Coherent light generators – Particular temperature control
Patent
1989-09-27
1991-04-02
Scott, Jr., Leon
Coherent light generators
Particular temperature control
372 33, 372 99, 372 38, H01S 304
Patent
active
050051776
ABSTRACT:
This invention describes a method and apparatus that can be used in optic quality monitoring of a gas laser. The method involves measuring the temperature of at least one of the optics in a gas laser, then subtracting the temperature of the laser enclosure from the optic temperature to obtain a temperature differential, and finally dividing the differential by a value proportional to the output power of the laser. The final value, termed "figure of merit", gives a quantitative measure of the condition of the optic. As a result appropriate cleaning and replacement decisions can be made for one or both of the optics in a gas laser.
REFERENCES:
patent: 4675874 (1987-06-01), Pohler et al.
patent: 4730323 (1988-03-01), Seaton
patent: 4782492 (1988-11-01), McMahon et al.
patent: 4823348 (1989-04-01), Hercher
patent: 4876690 (1989-10-01), Nishida et al.
"Excimer Lasers: Current Trends and Future Directions"--J. Reid, et al--Spie O-Lase'89-Jan. 1989.
"Chemistry Studies Improve Excimer Gas Lifetimes"--Laser Focus World, p. 93, Jun. 1989 by G. Jursich, et al.
Jr. Leon Scott
Lumonics Inc.
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