Laser optical system for micromachining

Details Laser optical system for micromachining Laser optical system for micromachining

1997-11-26

1999-12-28

Dang, Hung Xuan

Optical: systems and elements

Single channel simultaneously to or from plural channels

G02B 2710

Patent

active

060089431

ABSTRACT:
An optical system in which a coherent light beam is made more uniform in intensity in cross section. Two light shearing plates disposed at an angle to each other scramble the coherency of the light beam while homogenizing and expanding it. Each shearing plate has a partially reflecting element and a fully reflecting element. The resulting beam is of incoherent radiation having a high uniformity of illumination.

REFERENCES:
patent: 5224200 (1993-06-01), Rasmussen
patent: 5805342 (1998-09-01), Gravely

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