Coherent light generators – Particular beam control device – Control of pulse characteristics
Reexamination Certificate
2006-08-15
2006-08-15
Lee, Wilson (Department: 2821)
Coherent light generators
Particular beam control device
Control of pulse characteristics
C372S024000, C359S619000
Reexamination Certificate
active
07092415
ABSTRACT:
There is provided a structure for reducing optical loss in an optical apparatus (homogenizer) for making the intensity distribution of a laser beam uniform.In a multi-cylindrical lens (a glass substrate having a multiplicity of cylindrical lenses formed thereon) used in a homogenizer, convex cylindrical lenses and concave cylindrical lenses are arranged alternately, and the boundaries between the cylindrical lenses have a smooth structure. This makes it possible to reduce scattering of beams that has occurred at the boundaries between the cylindrical lenses.
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Fish & Richardson P.C.
Lee Wilson
Semiconductor Energy Laboratory Co,. Ltd.
Vu Jimmy
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