Electric heating – Metal heating – By arc
Reexamination Certificate
2006-09-18
2009-12-08
Evans, Geoffrey S (Department: 3742)
Electric heating
Metal heating
By arc
C134S001000
Reexamination Certificate
active
07629556
ABSTRACT:
Apparatuses and methods for cleaning a surface comprising contaminate particles are provided. In one respect, plasma and/or a shockwave may be created in a fluid flowing through a nozzle. The nozzle, coupled to a laser source and a fluid feed may be configured to deliver the generated plasma and/or shockwave to the surface.
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Evans Geoffrey S
Fulbright & Jaworski L.L.P.
Sematech Inc.
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