Laser microscope and a pattern inspection apparatus using such l

Details Laser microscope and a pattern inspection apparatus using such l Laser microscope and a pattern inspection apparatus using such l

1998-04-02

2000-03-28

Spyrou, Cassandra

Optical: systems and elements

Compound lens system

Microscope

359389, 359393, G02B 2100

Patent

active

060439327

ABSTRACT:
A laser microscope for picking up an image of a specimen at a high speed and a pattern checking apparatus for checking a pattern at a high speed with a high sensitivity can be provided. A plurality of light beams aligned in a first direction are produced from a light source device (1, 10), and these light beams are projected onto a specimen (7, 30) by an objective lens (6, 29) to form a light spot array on the specimen. The specimen is moved in a direction perpendicular to the light spot array or the light beams are moved by a beam deflecting device in said direction to scan the specimen two-dimensionally. Light beams emanating from the light spots on the specimen are made incident upon corresponding light receiving elements of a linear image sensor (11, 33). In case of checking periodic patterns such as memory cell patterns, a pitch of the light spots is corresponded to a pitch of the patterns, and defects in the patterns can be detected by comparing output signals from respective light receiving elements.

REFERENCES:
patent: 4072395 (1978-02-01), Mohon
patent: 4736110 (1988-04-01), Awamura
patent: 5035476 (1991-07-01), Ellis et al.
patent: 5587832 (1996-12-01), Krause
patent: 5673144 (1997-09-01), Chastang et al.
patent: 5774222 (1998-06-01), Maeda et al.
patent: 5804813 (1998-09-01), Wang et al.

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