Laser micromachining systems

Details Laser micromachining systems Laser micromachining systems

2005-11-29

2005-11-29

Evans, Geoffrey S. (Department: 1725)

Electric heating

Metal heating

By arc

C219S121860

Reexamination Certificate

active

06969822

ABSTRACT:
The described embodiments relate to laser micromachining a substrate. One exemplary embodiment includes a chamber configured to receive an assist gas from an assist gas source. The chamber is configured to allow a laser beam to pass through the chamber to contact a substrate positioned outside of the chamber. The laser machine also includes a nozzle plate positioned in gas receiving relation with the chamber, the nozzle plate having at least one nozzle opening formed therein, wherein the at least one nozzle opening is substantially coincident a footprint of a feature desired to be formed in the substrate.

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