Laser micromachining methods and systems

Details Laser micromachining methods and systems Laser micromachining methods and systems

2007-11-27

2007-11-27

Kosowski, Alexander (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S159000, C264S400000, C219S121600, C219S121700

Reexamination Certificate

active

10832034

ABSTRACT:
A method of laser machining a fluid path is provided. The method comprises directing a first laser toward a first surface, directing a second laser toward a second surface of the substrate, and directing a third laser toward the second surface along at least a portion of an edge of an area that defines a portion of the fluid path on the second surface.

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