Laser micromachining methods and systems

Details Laser micromachining methods and systems Laser micromachining methods and systems

2011-04-12

2011-04-12

Elve, M. Alexandra (Department: 3742)

Electric heating

Metal heating

By arc

C219S121670, C219S121680

Reexamination Certificate

active

07923658

ABSTRACT:
A method of laser machining a substrate is provided. The method comprises directing laser energy at a first surface of the substrate, while providing an assist medium at the first surface of the substrate at least at approximately the area at which the laser energy is being directed. The assist medium is no longer provided prior to completion of formation of a feature in the substrate created utilizing the laser energy.

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