Laser microbeam machine for acting on thin film objects, in part

Details Laser microbeam machine for acting on thin film objects, in part Laser microbeam machine for acting on thin film objects, in part

1989-11-24

1990-10-23

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118 501, 118729, 156643, 156646, 21912168, 427 531, B44C 122, C23F 102, C23C 1400, B23K 900

Patent

active

049649400

ABSTRACT:
The machine of the invention comprises a sealed enclosure (10) in which a microscope objective lens (34) is fixed and receives a laser beam (36) via a thick transparent window (38), the enclosure also containing a reaction chamber (20) constituted by a sealed box having a lid which constitutes a thin transparent window (56) beneath which the thin film object (32) to be treated is placed. Means (72, 80, 74) serve to evacuate the enclosure (10) and the reaction chamber (20) and to convey reactive gas into the reaction chamber. The invention is particularly applicable to treating electronic circuits, hybrid circuits, etc.

REFERENCES:
patent: 3626046 (1971-12-01), Krause et al.
patent: 4340617 (1982-07-01), Deutsch et al.
patent: 4801352 (1989-01-01), Piwczyk
patent: 4873413 (1989-10-01), Uesugi et al.
patent: 4901668 (1990-02-01), Murakami

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