Laser manufacture

Details Laser manufacture Laser manufacture

1986-05-08

1989-05-16

Hearn, Brian E.

Fishing, trapping, and vermin destroying

372 45, 372 46, 148DIG100, 148DIG95, 357 16, 357 17, 437126, 437133, H01L 2120, H01L 21203, H01L 21205

Patent

active

048309869

ABSTRACT:
A ridge waveguide laser structure is manufactured by a method including providing a photoresist stripe (8) on an exposed area of a p cap layer (4) of a multilayer laser wafer; etching channels (9) through the cap layer (4) and a p passive layer (3) using the stripe (8) and an oxide layer window (FIG. 4) as a mask; evaporating a passivating and insulating oxide (11, 11a) over the wafer, there being breaks (C) in the oxide where the stripe (8) is undercut during channel etching; and removing the stripe (8) and the oxide (11a) on it by a lift-off technique.

REFERENCES:
patent: 4213805 (1980-07-01), Tsukada
patent: 4400813 (1983-08-01), Kaminow
patent: 4575919 (1986-03-01), Logan et al.
patent: 4622673 (1986-11-01), Tsang
patent: 4644551 (1987-02-01), Kawano et al.
patent: 4662988 (1987-05-01), Renner
patent: 4728628 (1988-03-01), Fiddyment et al.
Serikawa et al, "Lift-Off Patterning of Sputtered SiO.sub.2 Films", J. Electrochem. Soc., vol. 128, No. 4, Apr. 1981, pp. 918-919.
Ghandhi, VLSI Fabrication Principles, New York: John Wiley and Sons, 1983.

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