Laser machining of a workpiece through adjacent mask by optical

Details Laser machining of a workpiece through adjacent mask by optical Laser machining of a workpiece through adjacent mask by optical

1995-03-10

1996-12-17

Evans, Geoffrey S.

Electric heating

Metal heating

By arc

21912174, 21912175, 2191218, B23K 2606

Patent

active

055850197

ABSTRACT:
A laser machining system employs a perforated proximity mask placed on or near a generally planar workpiece surface. Holes in the mask define a pattern of holes in the workpiece or marks on its surface to be formed by laser beam pulses passing through the mask. The beam is indexed from hole to hole or between groups of holes in the mask, between the pulses (or groups of pulses) of the laser. This indexing can be carried out by a pair of rotatable mirrors that direct the beam to a series of different holes in the mask via an optical element, e.g. a concave mirror or a telecentric lens assembly. This optical element converts the beams received from the indexing mirrors to a series of parallel beams that are directed to strike the mask and hence the workpiece generally normal to the workpiece surface. The optical element also serves the purpose of focusing each beam.

REFERENCES:
patent: 3699649 (1972-10-01), McWilliams
patent: 3742182 (1973-06-01), Saunders
patent: 4328410 (1982-05-01), Slivinsky et al.
patent: 4387952 (1983-06-01), Slusher
patent: 4866238 (1989-09-01), Karube
patent: 5037183 (1991-08-01), Gagosz et al.
patent: 5136136 (1992-08-01), Karube et al.
patent: 5296673 (1994-03-01), Smith
patent: 5310986 (1994-05-01), Zumoto et al.
patent: 5313043 (1994-05-01), Yamagishi
patent: 5449879 (1995-09-01), Lawson et al.
Hopkins, R. E. et al., "Optics for Laser Scanning", Optical Engineering, vol. 15(2), pp. 90-94, Mar./Apr. 1976.
Bachmann, F. G., "Generation of Blind Via-Holes for a High Density Multi-Chip-Module Using Excimer Lasers", Mat. Res. Soc. Symp. Proc., vol. 158, Dec. 1990.

Affiliated with

Also associated with

Rating

Laser machining of a workpiece through adjacent mask by optical does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser machining of a workpiece through adjacent mask by optical , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser machining of a workpiece through adjacent mask by optical will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1988798