Laser machining apparatus using focusing lens-array

Details Laser machining apparatus using focusing lens-array Laser machining apparatus using focusing lens-array

1989-10-12

1990-08-21

Albritton, C. L.

Electric heating

Metal heating

By arc

21912175, 2191218, B23K 2600

Patent

active

049508628

ABSTRACT:
A laser beam machining apparatus for finely machining a semiconductor circuit or similar workpiece on a stage including a scanning mirror for directing the beam, scanning lens for converting the beam to a beam substantially perpendicular to the workpiece, lens array unit and mask for focusing the beam, driving means for X-Y movement of the lens array unit and control means for controlling the mirror driving means and stage.

REFERENCES:
patent: 3586816 (1971-06-01), Hagen
patent: 4378480 (1983-03-01), Langhans
patent: 4874920 (1989-10-01), Yamazaki et al.

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