Laser lithography system with improved bandwidth control

Details Laser lithography system with improved bandwidth control Laser lithography system with improved bandwidth control

2011-03-01

2011-03-01

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular beam control device

Having particular beam control circuit component

C372S032000, C372S055000, C372S099000, C372S100000, C372S102000, C372S081000

Reexamination Certificate

active

07899095

ABSTRACT:
A method and apparatus may comprise a seed laser, along with an amplifier laser amplifying the output of the seed laser. A bandwidth metrology module may provide a bandwidth measurement and a bandwidth error signal may be provided using a bandwidth set point. A differential timing system responsive to the error signal can selectively adjust a differential firing time between the seed laser and amplifier laser. A beam dimension and center wavelength control system may adjust a beam dimension, within the cavity of the seed laser, to select bandwidth, and may adjust center wavelength at the same time, using a plurality of beam expansion prisms and at least one other prism or other optical element in the cavity to select center wavelength.

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