Laser link blowing in integrateed circuit fabrication

Details Laser link blowing in integrateed circuit fabrication Laser link blowing in integrateed circuit fabrication

1989-12-29

1991-06-04

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 7, 437935, 437936, H01L 21268, H01L 2100

Patent

active

050213628

ABSTRACT:
A single beam of radiation is split and part of the beam is directed to conductive links, e.g. runners on a substrate. Analysis of the incident beam and the beam reflected from the substrate permits a determination of when the link is blown and rendered non-conductive and when significant substrate involvement occurs.

REFERENCES:
patent: 4720620 (1988-01-01), Arima
patent: 4816422 (1989-03-01), Yerman et al.
patent: 4853758 (1989-08-01), Fischer
patent: 4902631 (1990-02-01), Downey et al.
Applied Physics Letters, vol. 5, No. 3, "Switching of Semi-conductor Reflectivity by a Giant Pulse Laser", pp. 54-56; Aug. 1, 1964; W. R. Sooy et al.
Journal of Applied Physics, vol. 39, No. 13, "Reflectivity Enhancement of Semiconductors by O-Switched Ruby Lasers", pp. 6032-6036, Dec. 1968; M. Birnbaum et al.
Applied Physics Letters, vol. 34, No. 6, "A transient Optical Reflectivity Study of Laser Annealing of Ion-Implanted Silicon: Thresholds and Kinetics", pp. 363-365, Mar. 15, 1979; Y. S. Liu et al.

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