Laser light source device, exposure device, and mask...

Details Laser light source device, exposure device, and mask... Laser light source device, exposure device, and mask...

2011-05-31

2011-05-31

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular beam control device

Nonlinear device

C359S199200

Reexamination Certificate

active

07953129

ABSTRACT:
A laser light source device1, comprising M number of laser light sources, of which frequency is shifted from a fundamental frequency by (m−1)·a·Δω, a first laser light source section2and a first fiber amplifier section4for amplifying these laser lights, a first optical multiplexer6for approximately coaxially superimposing the laser lights emitted from the first fiber amplifier section4and emitting the laser lights, a first wavelength conversion device9for multiplying the frequency of the laser lights emitted from the first optical multiplexer6by A, M number of laser light sources, of which frequency is shifted from the fundamental frequency by (m−1)·b·Δω, a second laser light source section3and a second fiber amplifier section5for amplifying these laser lights, a second optical multiplexer7for approximately coaxially superimposing the laser lights emitted from the second fiber amplifier section5and emitting the laser lights, a second wavelength conversion device10for multiplying the frequency of the laser lights emitted from the second optical multiplexer7by B, and a third wavelength conversion device11for simultaneously receiving the laser lights emitted from the first and second wavelength conversion devices9and10and converting the laser lights into laser lights, of which frequency is (A+B) times the fundamental frequency, the laser light source device1being characterized in that the expression A·a+B·b=0 is satisfied.

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