Laser irradiation system and application thereof

Details Laser irradiation system and application thereof Laser irradiation system and application thereof

1997-10-31

2000-05-09

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 57, 372 82, 372 55, H01S 322

Patent

active

060613750

ABSTRACT:
Dispersion of energy density in the longitudinal direction of excimer laser shaped into a linear beam is corrected. A gas introducing system which extends in the longitudinal direction of an oscillator and which is provided with a large number of gas injecting holes is provided within the oscillator. It allows to suppress dispersion of laser oscillating positions and to suppress the dispersion of irradiation energy density within the linear laser beam.

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