Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2005-04-18
2009-06-16
Le, Que T (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C250S221000
Reexamination Certificate
active
07547866
ABSTRACT:
The present invention is to provide a laser irradiation method for performing homogeneous laser irradiation to the irradiation object even when the thickness of the irradiation object is not even. In the case of irradiating the irradiation object having uneven thickness, the laser irradiation is performed while keeping the distance between the irradiation object and the lens for condensing the laser beam on the surface of the irradiation object constant by using an autofocusing mechanism. In particular, when the irradiation object is irradiated with the laser beam by moving the irradiation object relative to the laser beam in the first direction and the second direction of the beam spot formed on the irradiation surface, the distance between the irradiation object and the lens is controlled by the autofocusing mechanism before the irradiation object is moved in the first and second directions.
REFERENCES:
patent: 3689159 (1972-09-01), Taniguchi et al.
patent: 5675140 (1997-10-01), Kim
patent: 7115890 (2006-10-01), Amar et al.
patent: 7115903 (2006-10-01), Isobe et al.
patent: 2002/0031876 (2002-03-01), Hara et al.
patent: 2007/0034877 (2007-02-01), Isobe et al.
patent: 1159593 (1997-09-01), None
patent: 1264824 (2000-08-01), None
patent: 1428873 (2003-07-01), None
patent: 1 326 273 (2003-07-01), None
patent: 2004-031810 (2004-01-01), None
Office Action (Application No. 200510081724.4) Dated Nov. 16, 2007.
Tanaka Koichiro
Yamamoto Yoshiaki
Le Que T
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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