Laser, irradiation apparatus, laser irradiation method, and...

Details Laser, irradiation apparatus, laser irradiation method, and... Laser, irradiation apparatus, laser irradiation method, and...

2008-05-13

2008-05-13

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

Reexamination Certificate

active

10217477

ABSTRACT:
Providing a method and apparatus for efficiently irradiating a uniform laser light on an irradiation surface even when a laser light of high coherence or a large size substrate is used. The laser irradiation apparatus of the invention comprises a laser; means for dividing a laser light emitted from the laser into plural laser beams; means for synthesizing the laser beams on the irradiation surface or place in the vicinity thereof thereby forming a laser light having a periodical energy distribution; and means for moving the substrate relative to the laser light. Such a laser irradiation apparatus may be used to anneal the overall surface of a semiconductor film.

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