Coherent light generators – Particular beam control device – Control of pulse characteristics
Reexamination Certificate
2004-11-29
2009-06-23
Nguyen, Dung T (Department: 2828)
Coherent light generators
Particular beam control device
Control of pulse characteristics
C372S028000
Reexamination Certificate
active
07551655
ABSTRACT:
The object of the present invention is to provide a laser irradiation apparatus being able to enlarge the beam spot to a large degree compared with that of the CW laser, to suppress the thermal damage to the glass substrate, and to form an aggregation of crystal grains including a single crystal extending long in a scanning direction by growing the crystal continuously in the scanning direction. The laser irradiation of the present invention comprises a pulsed laser oscillator, a non-linear optical element for converting the wavelength of the laser light emitted from the pulsed laser oscillator, and an optical system for condensing the laser light whose wavelength is converted on a semiconductor film, wherein the pulsed laser oscillator has a repetition rate in the range of 10 MHz to 100 GHz.
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Tanaka Koichiro
Yamamoto Yoshiaki
Nguyen Dung T
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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