Laser irradiation apparatus and method

Details Laser irradiation apparatus and method Laser irradiation apparatus and method

1998-03-26

2000-08-15

Epps, Georgia

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

359618, 359628, G02B 2710

Patent

active

061045357

ABSTRACT:
Where an object is irradiated and scanned with laser beams that have been shaped into a linear shape and are moved in their width direction, a cylindrical lens group that is used in an optical system has a cylindrical face having an interior angle X that is not equal to 90.degree.. As a result, peaks of light interference can be prevented from being superimposed on each other, whereby striped irradiation unevenness formed in the longitudinal direction of the linear laser beams can be lowered.

REFERENCES:
patent: 5900980 (1999-05-01), Yamazaki et al.
patent: 5932118 (1999-08-01), Yamamoto et al.
patent: 5959779 (1999-09-01), Yamazaki et al.

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