Laser irradiation apparatus and laser irradiation method

Details Laser irradiation apparatus and laser irradiation method Laser irradiation apparatus and laser irradiation method

1997-02-12

1998-09-29

Scott, Jr., Leon

Coherent light generators

Particular beam control device

Control of pulse characteristics

372 24, 372 33, 372 28, 372 69, H01S 310

Patent

active

058154949

ABSTRACT:
Laser annealing is performed by irradiating, while scanning, a semiconductor thin-film with laser light. The laser light that is linear on the irradiation surface is moved in its line-width direction and applied non-continuously. The laser light has, in its line-width direction, an energy density profile that assumes a step-like form in which the energy density varies in a step-like manner. In particular, the scanning pitch D and the step widths L.sub.n are so set as to satisfy a relationship L.sub.n .gtoreq.D.

REFERENCES:
patent: 5263039 (1993-11-01), Skupsky et al.
patent: 5437412 (1995-08-01), Ozawa
patent: 5533040 (1996-07-01), Zhang

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