Laser irradiation apparatus

Details Laser irradiation apparatus Laser irradiation apparatus

2011-01-04

2011-01-04

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular beam control device

Modulation

C438S795000, C250S492200

Reexamination Certificate

active

07864823

ABSTRACT:
A laser irradiation apparatus is provided in which the occurrence of adverse effects on an object to be irradiated with a laser beam due to the difference in the polarization state between pulsed laser beams can be prevented or significantly reduced when the pulsed laser beams emitted from two laser light sources are guided to pass through the same optical path for irradiation of an object to be irradiated with the pulsed laser beams. The laser irradiation apparatus is provided with a first laser light source3, a second laser light source4, an optical path combining optical member7which guides the pulsed laser beams emitted from the first laser light source3and the second laser light source4to pass through the same optical path, and a polarization control member9which controls polarization state of the pulsed laser beam from the optical path combining optical member7. The polarization control member9includes a first polarization control portion13and a second polarization control portion15through which beam components of the pulsed laser beam pass. The polarization states of the beam components that have passed through the first polarization control portion13and the beam components that have passed through the second polarization control portion15become different from each other. The beam components in different polarization states are superimposed on each other on a surface to be irradiated with the laser beam of the object to be irradiated with the laser beam.

REFERENCES:
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patent: 2004095792 (2004-03-01), None
patent: 2007-110064 (2007-04-01), None
patent: 2007110064 (2007-04-01), None

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