Laser irradiation apparatus

Details Laser irradiation apparatus Laser irradiation apparatus

2005-11-01

2005-11-01

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular resonant cavity

Specified cavity component

C372S098000, C372S103000, C372S108000, C219S121600, C117S008000

Reexamination Certificate

active

06961361

ABSTRACT:
An object is to obtain an even energy distribution of a laser beam in one direction, thereby conducting a uniform laser annealing on a film.A laser irradiation apparatus comprising: a lens for dividing a laser beam in one direction; and an optical system for overlapping the divided laser beam, characterized in that the shape of the laser beam entering into the lens has edges vertical to the above-mentioned direction.

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Specification, claims, abstract, and drawing of U.S. Appl. No. 09/843,714, filed Apr. 30, 2001 entitled “Beam Homogenizer, Laser Irradiation Apparatus, Laser Irradiation Method, and Method of Manufacturing Semiconductor Device”.

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