Laser irradiation apparatus

Details Laser irradiation apparatus Laser irradiation apparatus

2005-11-01

2005-11-01

Mack, Ricky L. (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

C359S621000, C359S622000

Reexamination Certificate

active

06961184

ABSTRACT:
There are disposed two homogenizers for controlling an irradiation energy density in the longitudinal direction of a laser light transformed into a linear one which is inputtted into the surface to be irradiated. Also, there is disposed one homogenizer for controlling an irradiation energy density in a width direction of the linear laser light. According to this, the uniformity of laser annealing can be improved by the minimum number of homogenizers.

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