Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Patent
1998-03-04
1999-09-28
Sugarman, Scott J.
Optical: systems and elements
Single channel simultaneously to or from plural channels
By surface composed of lenticular elements
359623, G02B 2710
Patent
active
059597798
ABSTRACT:
An apparatus for irradiating an irradiation surface with a laser light having a linear or rectangular shape. A homogenizer operates on the principle that variations in the light intensity profile of an original beam as emitted from a laser device are dispersed by passing the original beam through two multi-cylindrical lenses. The directions of the respective multi-cylindrical lenses are set so as not to be parallel with the beam movement direction. Thus, an uniformity of annealing by irradiating with a laser light is improved.
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Kusumoto Naoto
Tanaka Koichiro
Yamazaki Shunpei
Semiconductor Energy Laboratory Co,. Ltd.
Sugarman Scott J.
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