Laser irradiation apparatus

Details Laser irradiation apparatus Laser irradiation apparatus

1997-02-28

2000-03-14

Epps, Georgia

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

359622, G02B 2710

Patent

active

060380756

ABSTRACT:
There are disposed two homogenizers for controlling an irradiation energy density in the longitudinal direction of a laser light transformed into a linear one which is inputtted into the surface to be irradiated. Also, there is disposed one homogenizer for controlling an irradiation energy density in a width direction of the linear laser light. According to this, the uniformity of laser annealing can be improved by the minimum number of homogenizers.

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K.S. Pennington and J.M. White "CCD Imaging Array Combining Fly's-Eye Lens With TDI for Increased Light-Gathering Abiblity", IBM Technical Disclosure Bulletin, vol. 21 No. 2, Jul. 1978.

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