Coherent light generators – Particular beam control device – Scanning
Patent
1998-03-02
2000-12-12
Font, Frank G.
Coherent light generators
Particular beam control device
Scanning
372 25, 372 57, 372101, 438166, H01S 310, H01S 322, H01S 308, H01L 2100
Patent
active
061608270
ABSTRACT:
To restrain nonuniformity of irradiation when a linear laser beam is irradiated by scanning the beam, linear laser pulses are irradiated by scanning the pulses in an oblique direction by which irradiation is carried out without overlapping peaks periodically present in the longitudinal direction of the linear laser beam and accordingly, nonuniformity of irradiation can be restrained.
REFERENCES:
patent: 3667832 (1972-06-01), Kitano et al.
patent: 4309225 (1982-01-01), Fan et al.
patent: 4439245 (1984-03-01), Wu
patent: 4475027 (1984-10-01), Pressley
patent: 4497015 (1985-01-01), Konno et al.
patent: 4733944 (1988-03-01), Fahlen et al.
patent: 4769750 (1988-09-01), Matsumoto et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5263250 (1993-11-01), Nishiwaki et al.
patent: 5307207 (1994-04-01), Ichihara
patent: 5561081 (1996-10-01), Takenouchi et al.
patent: 5858822 (1999-01-01), Yamazaki et al.
Pennington, et al., "CCD Imaging Array Combining Fly's-Eye Lens with TDI for Increased Light-Gathering Ability"; IBM Technical Disclosure Bulletin, vol. 21(2); pp. 857-858, 1978.
Turner, et al. "Gas Immersion Laser Diffusion For Efficient Cell Fabricating And Grain Boundary Research"; 16th IEEE Photovoltaic Specialist Conference--1982; pp. 775-780, San Diego, CA, 27-30, Sep., 1982 .
Font Frank G.
Rodriguez Armando
Semiconductor Energy Laboratory Co,. Ltd.
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