Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Patent
1998-04-20
2000-10-24
Epps, Georgia
Optical: systems and elements
Single channel simultaneously to or from plural channels
By surface composed of lenticular elements
359623, G02B 2710
Patent
active
061376337
ABSTRACT:
In a laser irradiating method, the distribution of an energy within a laser beam is unified using an optical system including: a cylindrical lens group 202 including a plurality of constituent lenses each having a width W for dividing a light into N(n-1) sections along a width direction of the beam; a parallelogram cylindrical lens group 501 having substantially an angle X defined by .vertline.tan X.vertline.=W/(d/(n-1)) for dividing the light into (2n+1) sections along a longitudinal direction of the beam; a parallelogram cylindrical lens 502 having substantially the angle X defined by .vertline.tan X.vertline.=W/(d/(n-1)) for re-coupling the lights divided along the longitudinal direction; and a cylindrical lens 204 for re-coupling the lights divided along the width direction; wherein the d is defined as an interval of the peaks of interference stripes formed on a plane on which the beam is irradiated which passes through one constituent lens constituting the cylindrical lens group 202 that divides the light in the width direction.
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Epps Georgia
Mack Ricky
Semiconductor Energy Laboratory Co,. Ltd.
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