Laser-irradiated thin films having variable thickness

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Non-single crystal – or recrystallized – material with...

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S066000, C257S070000, C257S072000

Reexamination Certificate

active

10754157

ABSTRACT:
A crystalline film includes a first crystalline region having a first film thickness and a first crystalline grain structure; and a second crystalline region having a second film thickness and a second crystalline grain structure. The first film thickness is greater than the second film thickness and the first and second film thicknesses are selected to provide a crystalline region having the degree and orientation of crystallization that is desired for a device component.

REFERENCES:
patent: 3632205 (1972-01-01), Marcy
patent: 4234358 (1980-11-01), Celler et al.
patent: 4309225 (1982-01-01), Fan et al.
patent: 4382658 (1983-05-01), Shields et al.
patent: 4456371 (1984-06-01), Lin
patent: 4639277 (1987-01-01), Hawkins
patent: 4691983 (1987-09-01), Kobayashi et al.
patent: 4727047 (1988-02-01), Bozler et al.
patent: 4758533 (1988-07-01), Magee et al.
patent: 4793694 (1988-12-01), Liu
patent: 4800179 (1989-01-01), Mukai
patent: 4855014 (1989-08-01), Kakimoto et al.
patent: 4870031 (1989-09-01), Sugahara et al.
patent: 4940505 (1990-07-01), Schachameyer et al.
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 4977104 (1990-12-01), Sawada et al.
patent: 5032233 (1991-07-01), Yu et al.
patent: 5061655 (1991-10-01), Ipposhi et al.
patent: RE33836 (1992-03-01), Resor, III et al.
patent: 5145808 (1992-09-01), Sameshima et al.
patent: 5204659 (1993-04-01), Sarma
patent: 5233207 (1993-08-01), Anzai
patent: 5285236 (1994-02-01), Jain
patent: 5291240 (1994-03-01), Jain
patent: 5304357 (1994-04-01), Sato et al.
patent: 5373803 (1994-12-01), Noguchi et al.
patent: 5395481 (1995-03-01), McCarthy
patent: 5409867 (1995-04-01), Asano
patent: 5453594 (1995-09-01), Konecny
patent: 5456763 (1995-10-01), Kaschmitter et al.
patent: 5496768 (1996-03-01), Kudo
patent: 5512494 (1996-04-01), Tanabe
patent: 5523193 (1996-06-01), Nelson
patent: 5529951 (1996-06-01), Noguchi et al.
patent: 5591668 (1997-01-01), Maegawa et al.
patent: 5710050 (1998-01-01), Makita et al.
patent: 5721606 (1998-02-01), Jain
patent: 5742426 (1998-04-01), York
patent: 5756364 (1998-05-01), Tanaka et al.
patent: 5766989 (1998-06-01), Maegawa et al.
patent: 5844588 (1998-12-01), Anderson
patent: 5861991 (1999-01-01), Fork
patent: 5893990 (1999-04-01), Tanaka
patent: 5986807 (1999-11-01), Fork
patent: 6014944 (2000-01-01), Aklufi et al.
patent: 6072631 (2000-06-01), Guenther et al.
patent: 6081381 (2000-06-01), Shalapenok et al.
patent: 6117752 (2000-09-01), Suzuki
patent: 6120976 (2000-09-01), Treadwell et al.
patent: 6130009 (2000-10-01), Smith et al.
patent: 6130455 (2000-10-01), Yoshinouchi
patent: 6156997 (2000-12-01), Yamazaki et al.
patent: 6162711 (2000-12-01), Ma et al.
patent: 6169014 (2001-01-01), McCulloch
patent: 6172820 (2001-01-01), Kuwahara
patent: 6177301 (2001-01-01), Jung
patent: 6187088 (2001-02-01), Okumura
patent: 6190985 (2001-02-01), Buynoski
patent: 6193796 (2001-02-01), Yang
patent: 6203952 (2001-03-01), O'Brien et al.
patent: 6235614 (2001-05-01), Yang
patent: 6242291 (2001-06-01), Kusumoto et al.
patent: 6285001 (2001-09-01), Fleming et al.
patent: 6300175 (2001-10-01), Moon
patent: 6313435 (2001-11-01), Shoemaker et al.
patent: 6316338 (2001-11-01), Jung
patent: 6320227 (2001-11-01), Lee et al.
patent: 6322625 (2001-11-01), Im
patent: 6326186 (2001-12-01), Kirk et al.
patent: 6326286 (2001-12-01), Park et al.
patent: 6333232 (2001-12-01), Kunikiyo
patent: 6341042 (2002-01-01), Matsunaka et al.
patent: 6348990 (2002-02-01), Igasaki et al.
patent: 6353218 (2002-03-01), Yamazaki et al.
patent: 6358784 (2002-03-01), Zhang et al.
patent: 6368945 (2002-04-01), Im
patent: 6388146 (2002-05-01), Onishi et al.
patent: 6388386 (2002-05-01), Kunii et al.
patent: 6392810 (2002-05-01), Tanaka
patent: 6393042 (2002-05-01), Tanaka
patent: 6407012 (2002-06-01), Miyasaka et al.
patent: 6410373 (2002-06-01), Chang et al.
patent: 6429100 (2002-08-01), Yoneda
patent: 6432758 (2002-08-01), Cheng et al.
patent: 6444506 (2002-09-01), Kusumoto et al.
patent: 6445359 (2002-09-01), Ho
patent: 6448612 (2002-09-01), Miyazaki et al.
patent: 6451631 (2002-09-01), Grigoropoulos et al.
patent: 6455359 (2002-09-01), Yamazaki et al.
patent: 6468845 (2002-10-01), Nakajima et al.
patent: 6472684 (2002-10-01), Yamazaki et al.
patent: 6476447 (2002-11-01), Yamazaki et al.
patent: 6482722 (2002-11-01), Kunii et al.
patent: 6493042 (2002-12-01), Bozdagi et al.
patent: 6495067 (2002-12-01), Ono
patent: 6495405 (2002-12-01), Voutsas et al.
patent: 6501095 (2002-12-01), Yamaguchi et al.
patent: 6506636 (2003-01-01), Yamazaki et al.
patent: 6511718 (2003-01-01), Paz de Araujo et al.
patent: 6512634 (2003-01-01), Tanaka
patent: 6516009 (2003-02-01), Tanaka
patent: 6521492 (2003-02-01), Miyasaka et al.
patent: 6526585 (2003-03-01), Hill
patent: 6528359 (2003-03-01), Kusumoto et al.
patent: 6535535 (2003-03-01), Yamazaki et al.
patent: 6555449 (2003-04-01), Im
patent: 6563077 (2003-05-01), Im
patent: 6573163 (2003-06-01), Voutsas et al.
patent: 6573531 (2003-06-01), Im et al.
patent: 6577380 (2003-06-01), Sposili et al.
patent: 6582827 (2003-06-01), Im
patent: 6590228 (2003-07-01), Voutsas et al.
patent: 6608326 (2003-08-01), Shinagawa et al.
patent: 6621044 (2003-09-01), Jain et al.
patent: 6635554 (2003-10-01), Im et al.
patent: 6635932 (2003-10-01), Grigoropoulos et al.
patent: 6667198 (2003-12-01), Shimoto
patent: 6693258 (2004-02-01), Sugano et al.
patent: 6734635 (2004-05-01), Kunii et al.
patent: 6784455 (2004-08-01), Maekawa et al.
patent: 6830993 (2004-12-01), Im et al.
patent: 6858477 (2005-02-01), Deane et al.
patent: 6908835 (2005-06-01), Sposili et al.
patent: 6961117 (2005-11-01), Im
patent: 2001/0001745 (2001-05-01), Im et al.
patent: 2001/0041426 (2001-11-01), Im
patent: 2002/0083557 (2002-07-01), Jung
patent: 2002/0104750 (2002-08-01), Ito
patent: 2002/0151115 (2002-10-01), Nakajima et al.
patent: 2003/0006221 (2003-01-01), Hong et al.
patent: 2003/0013278 (2003-01-01), Jang et al.
patent: 2003/0029212 (2003-02-01), Im
patent: 2003/0068836 (2003-04-01), Hongo et al.
patent: 2003/0096489 (2003-05-01), Im et al.
patent: 2003/0119286 (2003-06-01), Im et al.
patent: 2003/0148565 (2003-08-01), Yamanaka
patent: 2004/0053450 (2004-03-01), Sposili et al.
patent: 2004/0061843 (2004-04-01), Im
patent: 2004/0222187 (2004-11-01), Lin
patent: 2005/0032249 (2005-02-01), Im et al.
patent: 2005/0034653 (2005-02-01), Im et al.
patent: 2005/0059265 (2005-03-01), Im
patent: 2005/0202654 (2005-09-01), Im
patent: 19839 718 (1998-09-01), None
patent: 10103 670 (2001-01-01), None
patent: 681316 (1995-08-01), None
patent: 655774 (1996-07-01), None
patent: 2338342 (1999-12-01), None
patent: 1067593 (2001-10-01), None
patent: 2338343 (1999-12-01), None
patent: 2338597 (1999-12-01), None
patent: 62181419 (1987-08-01), None
patent: 2283036 (1990-11-01), None
patent: 04033327 (1992-02-01), None
patent: 04-279064 (1992-10-01), None
patent: 6252048 (1994-09-01), None
patent: 6283422 (1994-10-01), None
patent: 7176757 (1995-07-01), None
patent: 11064883 (1999-03-01), None
patent: 11-281997 (1999-10-01), None
patent: 2001023920 (2001-01-01), None
patent: WO-97/45827 (1997-12-01), None
patent: WO-98/24118 (1998-06-01), None
patent: WO-99/31719 (1999-06-01), None
patent: WO-00/14784 (2000-03-01), None
patent: WO-01/18854 (2001-03-01), None
patent: WO 01/18854 (2001-03-01), None
patent: WO-01/18855 (2001-03-01), None
patent: WO-01/71786 (2001-09-01), None
patent: WO-01/71791 (2001-09-01), None
patent: WO-02/031869 (2002-04-01), None
patent: WO-02/42847 (2002-05-01), None
patent: WO-02/086954 (2002-05-01), None
patent: WO-02/086955 (2002-10-01), None
patent: WO-01/18882 (2003-03-01), None
patent: WO-03/046965 (2003-06-01), None
patent: WO-03/084688 (2003-10-01), None
patent: WO-04/017379 (2004-02-01), None
patent: WO-04/017380 (2004-02-01), None
patent: WO-04/017382 (2004-02-01), None
patent: WO-2004/017381 (2004-02-01), None
patent: WO-04/075263 (2004-09-01), None
patent: WO-05/029546 (2005-03-01), None
patent: WO-05/029548 (2005-03-01), None
patent: WO-05/029550 (2005-03-01), None
Voutsas, A. T., “Assessment of the Performance of Laser-Based Lateral-Crystall

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Laser-irradiated thin films having variable thickness does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser-irradiated thin films having variable thickness, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser-irradiated thin films having variable thickness will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3752827

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.