Radiant energy – Ionic separation or analysis – With sample supply means
Patent
1991-04-05
1992-04-14
Berman, Jack I.
Radiant energy
Ionic separation or analysis
With sample supply means
250287, 250309, H01J 4904
Patent
active
051050820
ABSTRACT:
An ion beam is impinged against a solid sample to sputter neutrals. The neutrals thus sputtered are ionized by a UV laser beam to obtain photoions. The photoions are guided to a quadrupole mass analyzer through an ion extraction electrode to extract ions having a desired mass. The extracted ions are made incident upon an ion detector to derive ion pulses. The number of ion pulses is counted by a counter through a signal gate which is opened only during a time period that the photoions reaches the ion detector. A mass of the neutrals having a desired mass is analyzed from the counted value in the digital manner. A time period required for extracting the photoions is extended to perform the pulse counting without being influenced by the secondary ions which causes noises, so that the mass analysis can be performed with a high sensitivity.
REFERENCES:
patent: 4733073 (1988-03-01), Becker et al.
J. B. Pallix et al., Depth Profiling Using Intense UV Laser Ionization of Sputtered Neutrals, pp. 1-9, 1988, North-Holland, Amsterdam.
C. H. Becker, On the Use of Nonresonant Multiphoton Ionization of Desorbed Species for Surface Analysis, pp. 1181-1185, Jul./Aug. 1987.
C. M. Stahle et al., Quantitative Measurements of the Stoichiometry of Anodic Oxides Grown on Hg.sub.0.78 Cd.sub.0.22 Te, pp. 521-523, Sep. 1, 1985.
C. H. Becker et al., Nonresonant Multiphoton Ionization as a Sensitive Detector of Surface Concentrations and Evaporation Rates, pp. 1063-1065, Nov. 15, 1984.
Christopher H. Becker et al., Surface Analysis by Nonresonant Multiphoton Ionization of Desorbed or Sputtered Species, pp. 1671-1674, 1984.
Honma Yoshikazu
Kurosawa Satoru
Maruo Tetsuya
Berman Jack I.
Nippon Telegraph & Telephone Corporation
LandOfFree
Laser ionization sputtered neutral mass spectrometer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Laser ionization sputtered neutral mass spectrometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser ionization sputtered neutral mass spectrometer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2351622