Laser interferometry length measuring an apparatus employing a b

Details Laser interferometry length measuring an apparatus employing a b Laser interferometry length measuring an apparatus employing a b

1991-06-27

1992-12-15

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356351, 359636, G01B 902

Patent

active

051721864

ABSTRACT:
A laser interferometry length measurer for determining a moving distance of an object. The measurer includes a 45.degree. rotatory polarization plate for dividing a source light beam to a measuring beam and a reference beam; a reflector, which is placed to the object, for reflecting the measuring beam; a prism for composing the reference beam and the reflected measuring beam into a composed source beam; a beam splitter prism for distributing the composed source beam into a plural light beams which have different phases; and a determination unit to determine the moving distance of the object according to those beams.

REFERENCES:
patent: 3510198 (1970-05-01), Pace
patent: 3536375 (1969-01-01), Mansell
patent: 4702603 (1987-10-01), Augustyn
patent: 4717250 (1988-01-01), Sommargren

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