Laser interferometer type length measuring apparatus and positio

Details Laser interferometer type length measuring apparatus and positio Laser interferometer type length measuring apparatus and positio

1991-03-04

1992-08-25

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250548, G01B 1102

Patent

active

051413183

ABSTRACT:
In a laser interferometer type length measuring apparatus, a measurement laser beam will be influenced by disturbance such as air fluctuation and a change in air pressure distribution due to movement of an object so that a displacement of the object cannot be accurately measured. In order to obviate such an inconvenience, air controlled at a predetermined temperature is uniformly blown at a fixed speed on the entire optical path of the measurement laser beam.

REFERENCES:
patent: 4503335 (1985-03-01), Takahashi
patent: 4814625 (1989-03-01), Yasu
patent: 4984891 (1991-01-01), Miyazaki et al.

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