Laser interferometer including an optical unit having a corner c

Details Laser interferometer including an optical unit having a corner c Laser interferometer including an optical unit having a corner c

1992-03-09

1994-04-19

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356351, 356358, G01B 902

Patent

active

053050894

ABSTRACT:
The invention provides a laser interterometric measuring apparatus for measuring the position of an object. A corner cube prism receives a laser beam from a emitting device, splits the beams into a reference beam and a measuring beam, and let the beams to proceed to a fixed mirror and a movable mirror. The corner cube prism has a coated surface to selectively reflect or pass a beam therethrough in accordance with the polarization condition of the beam. On the coated surface of the corner cube prism are provided a parallelogram prism, a triangle prism disposed next to the parallelogram prism on the coated surface, and a polarizing plate disposed between the parallelogram prism and the triangle prism.

REFERENCES:
patent: 4802764 (1989-02-01), Young et al.
patent: 5172186 (1992-12-01), Hosoe

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