Laser interferometer for repeatable mounting on the wall of...

Optics: measuring and testing – By light interference

Reexamination Certificate

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Details

C356S493000, C356S482000, C356S500000, C356S513000

Reexamination Certificate

active

07315380

ABSTRACT:
A laser interferometer is disclosed comprising a housing capable of being substantially repeatably mounted to a wall of an environmental chamber, the housing including a laser source, a reflector attached to an object located within the environmental chamber, and a light passage provided through the wall of the environmental chamber enabling passage of a laser beam from the laser source to the reflector. At least one beam steerer may be provided for adjusting direction of passage of a laser beam through the light passage. Also disclosed is a column laser interferometer.

REFERENCES:
patent: 4865453 (1989-09-01), Gidon et al.
patent: 5550633 (1996-08-01), Kamiya
patent: 6473250 (2002-10-01), Chapman et al.
patent: 6539044 (2003-03-01), Kuzuta
patent: 2001/0006413 (2001-07-01), Burghoorn
patent: 2002/0047542 (2002-04-01), Higuchi
patent: 2003/0144819 (2003-07-01), Takeuchi et al.
patent: 1176507 (1998-03-01), None
patent: A-2000-088512 (2000-03-01), None
patent: WO 00/57228 (2000-09-01), None
patent: WO 2004/031816 (2004-04-01), None
H.J.J. Braddick; “Mechanical Design of Laboratory Apparatus”; Chapman and Hall Ltd.; pp. 1-31; 1960.

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