Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1990-11-16
1993-12-28
Turner, Samuel A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356358, G01B 902
Patent
active
052744361
ABSTRACT:
A laser interferometer uses an acousto-optically modulated laser (100) to produce a pair of orthogonally polarized frequency-shifted beams. The beams are passed down a monomode, polarization preserving optical fiber (110) in order to transmit the beams to a cavity (148). The beams are separated at polarizing beam splitter (128) and directed down measuring arm (130) and reference arm (132) of an interferometer. The beat frequency between the reflected beams is detected at photo-detector (146) which outputs a measuring signal (152). This beat frequency is compared to the beat frequency of the beams before entering the interferometer, which is derived by providing a semisilvered mirror (114) and interfering polaroid (116) in the path of the beams up-beam of the interferometer to produce a reference signal (126). The measuring and reference signals are compared to determine the movement of the measuring arm of the interferometer. This method of determining the reference signal makes the apparatus less susceptible to temperature changes.
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Absolute Optical Ranging With 200-NM Resolution by Williams et al. Optics Letter 14 (1989) 1 Jun., No. 11, N.Y.
Renishaw plc
Turner Samuel A.
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