Laser interferometer for inspecting the surface of a specimen

Details Laser interferometer for inspecting the surface of a specimen Laser interferometer for inspecting the surface of a specimen

1991-01-17

1992-07-07

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, 372 65, G01B 902

Patent

active

051277344

ABSTRACT:
A laser interferometer for inspecting the surface condition of a specimen by irradiating the specimen on a specimen support mechanism with a laser beam projected thereto through a reference plate, and observing the interference fringe produced by interference between reflected light from a reference surface of the reference plate and a surface of the specimen under inspection, the laser interferometer includes: an interferometer housing accommodating therein an optical laser beam guide member and an optical interference fringe imaging member, and is provided with a laser beam guide portion in a wall portion thereof; a laser tube mount member of a cylindrical form projected on the outer side of the housing and positioned in such a manner so as to circumvent the laser guide portion; and a laser tube detachably fitted in the laser tube mount member.

REFERENCES:
patent: 4377036 (1983-03-01), Dongschat
patent: 4654856 (1987-03-01), Markley et al.

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