Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2002-08-08
2008-10-07
Lee, Hwa (Andrew) (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07433053
ABSTRACT:
Apparatus for optical inspection of a sample includes a radiation source, adapted to irradiate a spot on the sample with coherent radiation, and collection optics, adapted to collect the radiation scattered from the spot so as to form a beam of scattered radiation. A diffractive optical element (DOE) is positioned to intercept the beam of scattered radiation and is adapted to deflect a first portion of the beam by a predetermined offset relative to a second portion of the beam, and then to optically combine the first portion with the second portion to generate a product beam. A detector is positioned to receive the product beam and to generate a signal responsive thereto, which is processed by a signal processor so as to determine an autocorrelation value of the product beam.
REFERENCES:
patent: 4731855 (1988-03-01), Suda et al.
patent: 5463459 (1995-10-01), Morioka et al.
patent: 5909281 (1999-06-01), Bruning
patent: 6366352 (2002-04-01), Goldberg et al.
Applied Materials Israel, Ltd.
Lee Hwa (Andrew)
Sughrue & Mion, PLLC
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