Laser-induced plasma micromachining

Details Laser-induced plasma micromachining Laser-induced plasma micromachining

2005-02-08

2005-02-08

Heinrich, Samuel M. (Department: 1725)

Electric heating

Metal heating

By arc

C219S121690

Reexamination Certificate

active

06852946

ABSTRACT:
A method and system for laser ablating a target material in an ambient atmosphere are disclosed. The method includes generating one or more laser pulses, each of the laser pulses having a pulse width of 1 picosecond (ps) or less and a pulse energy of 50 micro joules (μJ) or more. The laser pulses are directed towards the target material such that the laser pulses interact with a gas to form a plasma. The plasma removes a portion of the target material by interaction of the plasma with the target material.

REFERENCES:
patent: 5656186 (1997-08-01), Mourou et al.
patent: 5800625 (1998-09-01), Engelsberg et al.
patent: 6150630 (2000-11-01), Perry et al.
patent: RE37585 (2002-03-01), Mourou et al.
patent: WO 9527587 (1995-10-01), None

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