Laser imageable photomask constructions

Details Laser imageable photomask constructions Laser imageable photomask constructions

1993-09-22

1994-10-11

Rosasco, Steve

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430201, 430271, 430273, G03F 900

Patent

active

053546334

ABSTRACT:
Novel photomask blanks and methods for producing photomasks using laser-imaging apparatus. The photomask blanks include at least one layer that absorbs laser energy and ablates in response thereto, and, where unremoved as a result of the imaging process, perform the masking function by blocking the passage of actinic radiation; and a a mechanically strong, durable and flexible substrate that is substantially transparent to actinic radiation.

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