Laser illumination system

Details Laser illumination system Laser illumination system

1995-12-27

1998-12-29

Bovernick, Rodney

Coherent light generators

Particular beam control device

Optical output stabilization

372 57, H01S 313

Patent

active

058548033

ABSTRACT:
The illumination energy of an excimer laser is measured and adjusted to always effect illumination at constant energy. A laser beam output from an optics is reflected by a mirror, and applied to a sample. A beam profiler is disposed behind the mirror to measure the energy of an illumination laser beam. An energy attenuating device disposed between another mirror and the optics is operated based on the measurement value so that the energy of the laser beam applied to the sample is kept constant.

REFERENCES:
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5119390 (1992-06-01), Ohmori
patent: 5140600 (1992-08-01), Rebhan
patent: 5404366 (1995-04-01), Wakabayashi et al.
patent: 5463650 (1995-10-01), Ito et al.
patent: 5473412 (1995-12-01), Ozawa

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