Laser heated CVD process

Details Laser heated CVD process Laser heated CVD process

1984-10-30

1986-04-01

Newsome, John H.

Coating processes

Electrical product produced

Welding electrode

20415761, 118 501, B05D 306

Patent

active

045797501

ABSTRACT:
A laser powered chemical vapor deposition process and apparatus for producing heterogeneous nucleation and sustained growth of films on substrates. The process is conducted at low laser intensities and high reactant pressures so as to operate in the thermal domain. Semiconductor films and fabrication of fiber optic waveguides are illustrated in the process.

REFERENCES:
patent: 3957474 (1976-05-01), Kobayashi et al.
patent: 4260649 (1981-04-01), Denison et al.
patent: 4281030 (1981-07-01), Silfvast
patent: 4340617 (1982-07-01), Deutsch et al.

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